METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE HAVING POLYSILICON PLUGS,申请号KR20050052416-传众专利搜索

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发明名称	METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE HAVING POLYSILICON PLUGS
摘要
申请公布号	KR100679206(B1)	申请公布日期	2007.02.06
申请号	KR20050052416	申请日期	2005.06.17
申请人		发明人
分类号	H01L21/8242;H01L21/265;H01L21/285;H01L21/324;H01L21/336;H01L21/768	主分类号	H01L21/8242
代理机构		代理人
主权项
地址

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