ULTRAVIOLET LAMP AND ULTRAVIOLET IRRADIATION DEVICE

摘要

This invention is related to an ultraviolet lamp, particularly to an excimer lamp. Specifically disclosed is an excimer lamp (1) comprising a discharge tube (2) having a double-tube structure composed of an outer tube (3) made of a quartz glass and an inner tube (4) made of a quartz glass, a first electrode (8) arranged on the outer surface of the outer tube, and a second electrode (9) inserted in the inner tube. The outer tube has a curved surface portion (5), a rounded corner portion (5A) and a flat portion (6). The first electrode is made of aluminum and also serves as an ultraviolet reflective surface. Since this excimer lamp discharge tube has the curved surface portion and the rounded corner portion, it hardly cracks when it is applied with the pressure of the atmosphere or internal gas. In addition, the irradiation efficiency of ultraviolet light can be improved since the discharge tube has the flat portion.