| 摘要 |
<P>PROBLEM TO BE SOLVED: To set the origin position of a plane stage with high precision. <P>SOLUTION: The plane stage device 10 computes an operation position of a slider 14 from measured values obtained by laser interferometers 18 to 20. A control circuit is triggered with signals detected by position detection switches 22 to 24 to read the measured values of the laser interferometers 18 to 20, stores the measured values (x), (y) and θ to a memory, and performs an operation for obtaining the real origin position. Further, the control circuit computes a temporary origin position when the first position detection switch 22 and second position detection switch 23 are OFF, computes the angle difference between the temporary origin and real origin from measured values measured by the laser interferometers 18 to 20 when the first position detection switch 22 and second position detection switch 23 turn ON, and computes the difference in translation direction between the temporary origin position and real origin position as a correction value thereafter based upon the computed value of the angle difference. <P>COPYRIGHT: (C)2007,JPO&INPIT |
