TEMPERATURE COMPENSATION MECHANISM FOR MICROMECHANICAL RING VIBRATOR

摘要

PROBLEM TO BE SOLVED: To provide a micromechanical ring vibrator having a temperature compensation mechanism. SOLUTION: The resonator is an integrated micromechanical ring vibrator supported above a substrate and adapted to oscillate around an axis of rotation substantially perpendicular to the substrate. The ring vibrator comprises a central post extending from the substrate along the axis of rotation, a free-standing oscillating structure connected to the central post, including an outer ring 60 coaxial with the axis of rotation, and connected to the central post by means of a plurality of spring elements, and electrode structures disposed around the outer ring 60 and connected to the integrated electronic circuit. The free-standing oscillating structure further comprises a plurality of thermally compensating members 65 which are adapted to alter a mass moment of inertia of the free-standing oscillating structure as a function of temperature so as to compensate for the effect of temperature on the resonant frequency of the ring vibrator and are arranged around the outer ring 60. COPYRIGHT: (C)2007,JPO&INPIT