| 摘要 |
PROBLEM TO BE SOLVED: To efficiently and automatically regenerate an electroless plating solution. SOLUTION: An apparatus for regenerating the electroless plating solution comprises: a sensor 20b for measuring a forming rate of phosphorous acid which is formed in a plating tank 20 while plating treatment is conducted; a sampling device 21 for sampling the plating solution 100 in the plating tank, and transferring the sample to the first treatment tank 11; a sensor 31 for measuring the concentration of phosphorous acid contained in the sampled plating solution; an adding device 13 for supplying calcium carbonate or calcium hydroxide 104 necessary for producing calcium phosphite 105 from phosphorous acid contained in the plating solution, to the first treatment tank; a separation unit 14 for separating and removing the calcium phosphite which has been produced in the first treatment tank, from the plating solution; a returning pump 22 for transferring the plating solution from which the calcium phosphite has been separated and removed, to the plating tank; and a controller 10 for controlling transfer velocities of the sampling device 21 and the returning pump 22. COPYRIGHT: (C)2007,JPO&INPIT
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