SEMICONDUCTOR DEVICE FABRICATION INSPECTION DEVICE HAVING SELF-DIAGNOSIS FUNCTION

摘要

It is possible to provide a semiconductor device fabrication inspection device having a self-diagnosis function capable of effectively maintaining measurement accuracy concerning a semiconductor device. The semiconductor device fabrication inspection device having the self-diagnosis function includes: a probe generation device for emitting a probe such as an electron beam to a sample to be measured; a probe generation control device for controlling the operation of the probe generation device; and a database for inputting and storing information indicating the operations of various devices including at least the probe generation device and the probe generation control device.