| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a structure in a cell by which a structure in a cell can be efficiently formed with high definition by forming a desired imaging pattern on an exposure face of a photosensitive layer while suppressing production of jaggy without decreasing an exposure speed. <P>SOLUTION: The method for manufacturing a structure in a cell includes drawing for exposure by tilting a light modulating means, wherein at least one of the arrangement pitch (a), tilt angle (b), drawing pitch (c) and phase difference (d) of drawn pixels is determined so that at least either the jaggy pitch or jaggy amplitude of jaggy produced when an image is reproduced by drawn pixels formed by drawing units is controlled to a specified value or less, and the drawing unit is controlled by modulation at a predetermined timing based on pattern information. <P>COPYRIGHT: (C)2007,JPO&INPIT |
