发明名称 MULTI-BIT NONVOLATILE MEMORY DEVICE INCLUDING NANO-CRYSTALS AND TRENCH, AND METHOD OF FABRICATING SAME
摘要 PROBLEM TO BE SOLVED: To provide a nonvolatile memory integrated circuit device capable of storing 2 bits. SOLUTION: The nonvolatile memory integrated circuit device includes a semiconductor substrate, a source and a drain formed in the semiconductor substrate, a stepped recess channel formed between the source and the drain, a trap structure including a multitude of nano-crystals for storing electric charge laid out on a region of the stepped recess channel, and a gate on the trap structure. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007027759(A) 申请公布日期 2007.02.01
申请号 JP20060196048 申请日期 2006.07.18
申请人 SAMSUNG ELECTRONICS CO LTD 发明人 KIM IL-KWON
分类号 H01L21/8247;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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