| 摘要 |
PROBLEM TO BE SOLVED: To eliminate turbulence and stagnancy at an upstream of a gas channel connected to an inlet section so as to eliminate a local block. SOLUTION: This system includes a substrate processing chamber for processing a substrate, a heating means for heating up the substrate, a supply system for supplying an intended gas to the substrate processing chamber, an exhaust system for exhausting the atmosphere in the substrate processing chamber, and a trap device prepared in the exhaust system for solidifying and capturing a gas exhausted from the processing chamber, wherein the system has the trap main body 102, and the trap device including an inlet section 103 connected to the trap main body 102, and the trap main body 102 includes a curvature gas channel 105 inside, and at least part of the inlet section 103 is made of a bent pipe that smoothly guides a substrate processing chamber atmosphere to the gas channel 105. COPYRIGHT: (C)2007,JPO&INPIT
|
