| 摘要 |
PROBLEM TO BE SOLVED: To realize easy attachment position adjustment of a fine tube such as a gas supply tube in a processing furnace of a substrate processing device. SOLUTION: The device has reaction tubes 45, 46 forming a processing chamber for processing a substrate, a manifold 44 wherein the reaction tube is raised and provided, a port 40 provided to the manifold, a fine tube 47 inserted to the port inside the processing chamber, a projection formed in the fine tube, and a fitting means which is provided to the manifold for confining displacement of the processing chamber in the radial direction. COPYRIGHT: (C)2007,JPO&INPIT
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