| 摘要 |
PROBLEM TO BE SOLVED: To quickly switch a measuring device. SOLUTION: When a plurality of kinds of electrical characteristics of an element 10 to be measured which is a semiconductor element are measured, by switching a plurality of measuring means connected to switching means 1256, 1258, the element to be measured is separated from the second measuring means and connected to the first measuring means; and then a voltage is applied to the element to be measured by the first measuring means through the switching means, and an output voltage from the second measuring means is made to match therewith. Then, the element 10 to be measured is separated from the first measuring means, is connected to the second measuring means, and then measured. COPYRIGHT: (C)2007,JPO&INPIT
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