LIQUID DROPLET DISCHARGE HEAD, LIQUID DROPLET DISCHARGE APPARATUS, AND METHOD FOR MANUFACTURING LIQUID DROPLET DISCHARGE HEAD

摘要

PROBLEM TO BE SOLVED: To provide a liquid droplet discharge head which seals a vibration chamber constituting an electrostatic actuator, while reduced in size. SOLUTION: The liquid droplet discharge head comprises: a nozzle substrate 4 having a nozzle 8 to discharge a liquid droplet; a cavity substrate 2 having a recess which communicates with the nozzle 8 and is a discharge chamber 13 with its bottom surface formed as a vibration plate 12; and an electrode substrate 3 bonded to the cavity substrate 2 so that the vibration plate 12 and an electrode 17 face each other with a space between, wherein the space is sealed with a sealant. The space is constituted of: a first space 20a in which the vibration plate 12 is vibrated; and a second space 20b which communicates with the first space 20a and is sealed with the sealant 24a, and the second space 20b is narrower than an average free travel of the sealant 24a. COPYRIGHT: (C)2007,JPO&INPIT