发明名称 |
Fluid Deposition Cluster Tool |
摘要 |
A cluster tool is described including a main chamber, a load chamber, a fluid deposition chamber and an environmental controller. The load chamber is coupled to the main chamber and configured to receive one or more substrates. The fluid deposition chamber is coupled to the main chamber and includes a fluid deposition device configured to deposit fluid onto the one or more substrates. A robot is included in the main chamber, the robot configured to transfer the one or more substrates between the load chamber and the fluid deposition chamber. The environmental controller is configured to maintain a substantially autonomous environment within the cluster tool.
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申请公布号 |
US2007026151(A1) |
申请公布日期 |
2007.02.01 |
申请号 |
US20060457078 |
申请日期 |
2006.07.12 |
申请人 |
HIGGINSON JOHN A;ROCCHIO MICHAEL;BIRKMEYER JEFFREY;DEMING STEPHEN R;VON ESSEN KEVIN;BIBL ANDREAS;GARDNER DEANE A |
发明人 |
HIGGINSON JOHN A.;ROCCHIO MICHAEL;BIRKMEYER JEFFREY;DEMING STEPHEN R.;VON ESSEN KEVIN;BIBL ANDREAS;GARDNER DEANE A. |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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