发明名称 |
Substrate transfer system |
摘要 |
A substrate transfer system is used in fabricating a liquid crystal display (LCD) device. The system includes a cassette having a bar code, a cassette stocker to store the cassette; an auto guided vehicle that is able to transfer the cassette; a moving path unit to determine a moving path of the auto guided vehicle, a plurality of process stages at which processes are conducted on a substrate during fabrication of the LCD device, and a host to control the cassette stocker, the auto guided vehicle and the process stages. At least one of the auto guided vehicle and the cassette stocker having a bar code reader.
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申请公布号 |
US2007027575(A1) |
申请公布日期 |
2007.02.01 |
申请号 |
US20060529349 |
申请日期 |
2006.09.29 |
申请人 |
CHAE KYUNG-SU;SONG HYUN-HO |
发明人 |
CHAE KYUNG-SU;SONG HYUN-HO |
分类号 |
G02F1/13;G06F7/00;H01L21/00 |
主分类号 |
G02F1/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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