发明名称 |
Vertical comb actuator radio frequency micro-electro-mechanical system switch |
摘要 |
A vertical comb actuator radio frequency (RF) micro-electro-mechanical system (MEMS) switch. The RF MEMS switch includes a substrate; first and second signal lines spaced at a predetermined interval from each other and deposited on an upper surface of the substrate; an actuator positioned over the first and second signal lines when viewed from the upper surface of the substrate and spaced at a predetermined interval from the first and second signal lines; and a fixing portion positioned over the actuator when viewed from the upper surface of the substrate, wherein the fixing portion permits the actuator to come in contact with the first and second signal lines when a predetermined driving voltage is applied. Thus, it is possible to prevent the actuator from sticking to the substrate. In addition, the RF MEMS switch can be operated with a low voltage and insertion loss and power loss can be reduced.
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申请公布号 |
US2007024390(A1) |
申请公布日期 |
2007.02.01 |
申请号 |
US20060417242 |
申请日期 |
2006.05.04 |
申请人 |
SAMSUNG ELCTRONICS CO., LTD. |
发明人 |
HONG YOUNG-TACK;YUN SEOK-CHUL;CHANG SEOK-MO;KWON SANG-WOOK;KIM CHE-HEUNG;KIM JONG-SEOK;JEONG HEE-MOON;LEE SANG-HUN;KIM JUN-O;SONG IN-SANG |
分类号 |
H01P1/10 |
主分类号 |
H01P1/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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