| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-purity and dense optical reflection mirror substrate havings a high heat conductivity. <P>SOLUTION: The optical reflection mirror substrate is made of a silicon carbide material which is composed of silicon carbide of ≥99.5 mass%, has a relative density of ≥99.9% and has a heat conductivity of ≥260 W/mK. The optical reflection mirror substrate is excellent in heat durability and dimensional stability, includes extremely little impurity, is dense and, therefore, is capable of working a reflection surface flatly with a high accuracy, whereby a high reflectance essential for an optical reflection mirror can be obtained. <P>COPYRIGHT: (C)2007,JPO&INPIT |
