| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an elastic surface-wave actuator, by which an excitation means can be prevented from being damaged and the durability of a stator can be improved. <P>SOLUTION: The elastic surface-wave actuator comprises a stator 1 comprising a piezoelectric board 2 and electrodes 3a, 3b being the excitation means for generating elastic surface waves on the piezoelectric board 2; and a mover 4, that is made to contact the the surface region P2 of the piezoelectric board 2 excluding an excitation region P1 on which the electrodes 3a, 3b are formed by prescribed pressure, and is moved by the elastic surface waves. A hard film 5, having hardness higher than that of the piezoelectric board 2 is formed on the surface region P2 of the piezoelectric board 2, including a moving region P3 that moves the mover 4 in a manner of contact, and the hard film 5 has a film thickness to such a level that the mover 4 and the electrodes 3a, 3b do not interfere with each other. <P>COPYRIGHT: (C)2007,JPO&INPIT |
