| 摘要 |
PROBLEM TO BE SOLVED: To substantially improve spectrum performance of a 2-stage narrow-spectrum laser apparatus by allowing only a region exhibiting favorable distribution characteristics to be incident on the gain region of the amplifying stage. SOLUTION: A laser beam from a laser 1 of oscillation stage is guided to a laser 2 of amplifying stage and is injected into it through a propagation mirror 4a, a beam forming unit 5, and a propagation mirror 4b. The beam forming unit 5 forms the laser beam injected from the laser 1 of oscillation stage into the laser 2 of amplifying stage 2, so that spectrum characteristics of the beam emitted from the laser 1 of oscillation stage and incident on the gain region of the laser 2 of amplifying stage may be favorable. A beam segmenting or expanding means or beam optical axis adjusting means, for example, can be used as the beam forming unit 5. The state of beam forming may be adjusted according to timely diagnosing of spectrum characteristics after amplification and distribution information of spectrum width if necessary. COPYRIGHT: (C)2007,JPO&INPIT
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