METHOD FOR PROCESSING METAL MEMBER AND APPARATUS FOR PROCESSING METAL MEMBER

摘要

Before bonding electrodes together, oxide films on the electrode surfaces are removed without using hydrochloric acid. Two chips respectively provided with an electrode are carried into a processing chamber, and respectively sucked onto an upper chuck and a lower chuck. Then, a nitrogen gas is introduced into the processing chamber, thereby creating a low oxygen atmosphere. After that, a hydrogen gas and a nitrogen gas are introduced into the processing chamber and each electrode is heated in the mixed gas atmosphere. Consequently, the oxide film on the surface of each electrode is reduced with hydrogen, and thus the oxide film is removed from the electrode surface.