| 摘要 |
Thermal process equipment is provided to continuously perform a heat treatment process by driving cooling fans for exhausting the heat generated from a control unit which generally controls thermal process equipment even if one of the cooling fans stops driving. A plurality of substrates are installed in a control unit to control a process chamber in which a heat treatment is performed. A plurality of cooling fans(230) cool down the inside of the control unit heated by the plurality of substrates, formed on the outer surface of the control unit. A power supply source(240) supplies power to the cooling fans through an electric wire(250) connected to the plurality of cooling fans. A plurality of fuses(260) block the supply of power when overcurrent is supplied to each cooling fan, installed in the electric wire. The plurality of fuses can be disposed as a parallel structure on the electric wire.
|
