| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machine where, in the case laser beams branched by a polarization separation element are respectively circularly polarized, a high circular polarization ratio can be obtained at each light path. <P>SOLUTION: Regarding the laser beam machine provided with: a laser oscillator; a light path bifurcation section 2 where a laser beam from the laser oscillator is branched into a plurality of light paths, so as to be output; and a projection lens where the respective laser beams branched at the light path bifurcation section 2 are emitted to an object, and performing laser machining to an object, in the light path bifurcation section 2, a polarization separation element 21 allowing the P polarized light of the laser beam I from the laser oscillator to transmit at a prescribed transmissivity, further reflecting the S polarized light at a prescribed reflectivity, and branching the same into two light paths, 1/4 wavelength plates 24a, 24b converting the laser beams of each polarization component branched by the polarization separation element 21 into circularly polarized light or elliptically polarized light, and polarization control elements 22a, 22b located in at least one light path therebetween and damping the other polarization component comprised in the branched laser beams are arranged. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
