| 摘要 |
PROBLEM TO BE SOLVED: To neutralize charge on a sample generated by irradiation of a charged particle beam or the like by efficiently generating ions by introducing UV light by a UV light introduction tube to irradiate the sample with it when the sample is irradiated with the charged particle beam and by introducing gas into a surface of the sample or in the vicinity thereof from a gas introduction tube, in relation to a charged particle beam device and a charged particle beam image generation method for generating an image by detecting a secondary particle beam emitted by irradiating a sample with a charged particle beam. SOLUTION: By providing: an image generation means for generating an image by detecting a secondary particle beam emitted by scanning the surface of a sample with a charged particle beam; a gas introduction means for introducing a gas in the vicinity of the sample; and a UV light introduction means for introducing UV light in the vicinity of an area to irradiate it where the sample is irradiated with the charged particle beam to irradiate the sample with it; the gas is introduced in the vicinity of the sample by the gas introduction means when the sample is irradiated with the charged particle beam, and the UV light is introduced by the UV light introduction means to irradiate the sample with it, whereby charge on the sample generated by the irradiation of the charged particle beam is neutralized. COPYRIGHT: (C)2007,JPO&INPIT
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