发明名称 |
METHOD AND SYSTEM FOR ESTIMATING A STATE OF AN UNINITIALIZED ADVANCED PROCESS CONTROLLER BY USING SEGREGATED CONTROLLER DATA |
摘要 |
An APC controller is configured to operate on a segregated data structure during its normal operation and to establish a control state during an initializing event for a non-initialized manufacturing context on the basis of other initialized or non-initialized manufacturing contexts. Thus, the processing of pilot substrates may be reduced or the processing of the pilot substrates may be initiated on the basis of reliably established process parameters.
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申请公布号 |
US2007027568(A1) |
申请公布日期 |
2007.02.01 |
申请号 |
US20060383005 |
申请日期 |
2006.05.12 |
申请人 |
GOOD RICHARD P;SCHULZE UWE |
发明人 |
GOOD RICHARD P.;SCHULZE UWE |
分类号 |
G06F19/00 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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