FLOW VOLUME CONTROLLER, REGULATOR UNIT USED FOR SUCH FLOW VOLUME CONTROLLER, AND VALVE UNIT

摘要

Provided are a flow volume controller which can be easily handled and has high versatility, a regulator unit used for such flow volume controller, and a valve unit. The flow volume controller is provided with the regulator unit having a regulator and a first pressure sensor; the valve unit having a second pressure sensor and a flow volume control valve; and an orifice unit, which is removably connected to the regulator unit and the valve unit for connecting the regular unit with the valve unit, and constitutes a fluid channel and an orifice.