MEMS SWITCH AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a MEMS (Micro Electro Mechanical System) switch capable of being driven with low voltage, and to provide its manufacturing method. SOLUTION: The disclosed MEMS switch comprises a lower board having a signal line formed on the upper face, an upper board installed on the upper face of the lower board at a predetermined space and having a membrane layer formed on the lower face and a cavity formed inside, a bimetal layer installed inside the cavity on the upper face of the membrane layer, a heating layer installed on the lower face of the membrane layer, and a contact member formed on the lower face of the heating layer for contacting or leaving the signal line. COPYRIGHT: (C)2007,JPO&INPIT