| 摘要 |
PROBLEM TO BE SOLVED: To provide a holder for production of an organic light emitting display device capable of transferring a substrate, a film tray, and a mask to a single chamber at the same time and advancing processes. SOLUTION: The holder comprises a main body and a plurality of holding members which are formed on both ends of the main body. Each holding member is composed of a side wall having a predetermined height and a holding plate bent into L-shape. A lot of steps are formed in the holding plates so that the plates can hold the substrate, the film tray, and mask, respectively, keep their position during the transfer, and prevent shift of patterns. COPYRIGHT: (C)2007,JPO&INPIT
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