| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method which enables the precise and automatical detection of the quality of the pitch irregularity of BM of a substrate for a color filter substrate having stripe like BM arranged on its one side in a lattice state. SOLUTION: The image of the diffraction light from the stripes of the substrate due to reflected illumination is photographed by an imaging part by allowing the irradiation direction of reflected illumination orthogonally to the longitudinal direction of the stripes of the substrate to coincide with the direction of the imaging part comprising a line sensor while feeding the substrate orthogonally to the longitudinal direction of the stripes of the substrate and, from the change degree of the color or brightness of the image of the diffraction light, the degree of the pitch irregularity of stripes is detected to judge the quality of the pitch irregularity of BM. COPYRIGHT: (C)2007,JPO&INPIT
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