| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-frequency heater having rail constitution with stability by rail holding fixation, capable of preventing a spark from being generated, and capable of improving cleaning property in a chamber. SOLUTION: Opening holes 20 are provided in horizontal positions in this side and a deep side, in desired positions on both faces of the heating chamber 11, rod-like linear rails 14 are formed in the opening holes 20, and a screw-worked tip portion is inserted thereinto and is fastened by a washer 12 and a nut 13 to be fixed. COPYRIGHT: (C)2007,JPO&INPIT
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