| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid-immersed projection optical system which is capable of correcting a spherical aberration well, and suppressing the occurrence of other aberrations. <P>SOLUTION: The projection optical system projecting an image on a first plane (R) onto a second plane (W) is equipped with a first light-transmitting member (Lp) arranged nearest to the second plane (W), and a second light-transmitting member (Lb) arranged adjacent to the first light transmitting member (Lp). An optical path located between the first light-transmitting member (Lp) and the second plane (W) is filled up with a first liquid, and an optical path located between the first light-transmitting member (Lp) and the second light-transmitting member (Lb) is filled up with a second liquid whose refractive index is different from that of the first liquid. The first light-transmitting member is constituted so as to be movable in the direction of an optical axis. <P>COPYRIGHT: (C)2007,JPO&INPIT |
