| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration gyro sensor which is attempted to improve in durability at a lower cost, while maintaining the characteristics of size reduction. <P>SOLUTION: The gyro sensor 1 comprises a support substrate 2, having a wiring pattern 5 provided with a plurality of lands 4 and a pair of vibrating elements 20X and 20Y mounted on the supporting substrate 2. Each vibrating element 20 has a base 22 provided with a mounting surface, having the plurality of terminal parts 25 to be connected with the lands 4, and the vibrating parts 23 provided with a substrate facing surface, constituting a surface identical to the mounting surface of the base 22, from which it protrudes like a cantilever from the side periphery of the base 22, the base parts of the vibrator parts 23 have reinforcement parts 129, the sections of which are made gradually large. <P>COPYRIGHT: (C)2007,JPO&INPIT |
