| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a stage apparatus which allows rotatable stage members which have a plurality of magnetic flux generating devices or a plurality of drive coils fixed thereto, to be miniaturized, as much as possible. <P>SOLUTION: The stage apparatus includes stage members 40 and 45 supported on a stationary support plate 30 so as to be capable of movement including rotation; and a plurality of Y-direction moving coils CYA and CYB fixed to the stage members, which generate Y-direction driving forces, by receiving magnetic fluxes from Y-direction magnetic flux generating devices fixed to the stationary support plate. When the stage members are in a non-operating state, Y-direction moving coils will not overlap each other in the Y direction, but will overlap each other in the X direction. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
