| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a storage container for a pellicle capable of transportation in which a load placed in a support frame of a pellicle is made more uniform for securer fixation for a photomask. <P>SOLUTION: Disclosed is the storage container for the pellicle for transporting the pellicle 5 having a pellicle film 6 and the support frame 7 supporting the pellicle film 6, the storage container 1 for the pellicle being equipped with a tray 3 and a cover 2 serving as its cover, and a mount part 4 which is mounted with the support frame 7 inside one of the tray 3 and cover 2 and made of a material having higher rigidity than the tray 3 and cover 2. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
