| 摘要 |
PROBLEM TO BE SOLVED: To provide an adhesion device capable of accurately positioning and adhering an adhesive tape cut at a predetermined length to a substrate. SOLUTION: The terminal unit of an adhesion device a comprising a plurality of terminals is provided at a predetermined length on the upper surface of the side in the substrate, cuts the adhesive tape adhered to a parting tape in a length corresponding to the terminal, and adheres a cut piece to the terminal. The device is provided with a table 7 on which the substrate is loaded, a cutting unit 23 that cuts the adhesive tape 2 at a predetermined length, a chuck 21 that transfers and positions the cut adhesive tape together with the parting tape to a position opposed to the terminal 1 of the substrate loaded on the table, first and second cameras 36, 37 that image one end and the other end of the positioned adhesive tape, a controller 39 that compensates the relative position of the adhesive tape and the substrate based on an image signal from the camera, and a pressurizing tool 13 that compressively adheres the adhesive tape to the substrate after the position is compensated by the controller. COPYRIGHT: (C)2007,JPO&INPIT
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