OPTICAL INSPECTION DEVICE HAVING LENS UNIT WITH AT LEAST A PAIR OF BEAM PATHS INSIDE, AND METHOD OF DETECTING SURFACE DEFECT OF SUBSTRATE USING SAME

摘要

PROBLEM TO BE SOLVED: To provide an optical inspection device used for detecting the surface defects of a substrate. SOLUTION: The optical inspection device comprises a chuck 53 where the substrate 55 is loaded, and a lens unit 60 positioned on the chuck 53. The lens unit 60 has at least a pair of beam paths inside, and the beam path allows light to go straight. A camera 61 is provided on the lens unit 60, and the camera 61 converts light through the lens unit 60 as an image. A method for detecting the surface defect of the substrate 55 by using the inspection device is also provided. COPYRIGHT: (C)2007,JPO&INPIT