| 摘要 |
PROBLEM TO BE SOLVED: To provide method and system of microcrack inspection for electrically detecting microcrack of a testing item with a high degree of accuracy. SOLUTION: The inspection method of workpieces is to test a workpiece 10 equipped with an elastic body 12 and a conductor section 11 arranged on the above elastic body 12. In this method, the above elastic body 12 is deformed to allow detection of microcrack, based on parameters of electric output values from the above conductor section 11. COPYRIGHT: (C)2007,JPO&INPIT
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