SUBSTRATE HAVING LIGHT SHIELDING FLIM, COLOR FILTER SUBSTRATE AND METHOD OF MANUFACTURING THE SAME, AND DISPLAY DEVICE WITH THE SUBSTRATE HAVING LIGHT SHIELDING FLIM

摘要

A substrate with a light shielding film, a method for manufacturing the substrate, a color filter substrate, and a method for manufacturing the color filter substrate are provided to achieve a good etching profile even when a light shielding film having a chromium oxide layer is used. A light shielding film(10) is formed on a substrate(1). The light shielding film comprises a first film(2) having chromium oxide, and a second film(3) formed on the first film and having chromium. The cross-sectional shape of the pattern of the light shielding film has a forward taper shape. The second film is capable of having chromium nitride. The thickness of the first film ranges from 20 to 100 nanometers, and the thickness of the second film ranges from 20 to 400 nanometers.