发明名称 Systems and methods for implant dosage control
摘要 A system for implantation dosage control. A first interface receives scan position information. A second interface receives beam current information specifying a first beam current value between scans and a plurality of second beam current values during one of the scans. A controller, determines a tolerance range according to the first beam current value, determines whether the second beam current values exceeds the tolerance range, and calculates number of the second beam current values exceeding the tolerance range.
申请公布号 US2007023695(A1) 申请公布日期 2007.02.01
申请号 US20050176469 申请日期 2005.07.07
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 CHENG NAI-HAN;CHANG STOCK;PENG WEN-YUH
分类号 H01J37/08 主分类号 H01J37/08
代理机构 代理人
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