发明名称 |
Transparent base with transparent conductive film, method for producing same, and photoelectric converter comprising such base |
摘要 |
The present invention provides a transparent substrate with a transparent conductive film that is thin but has a surface with concavities and convexities of increased height. A manufacturing method of the present invention includes a process of forming a transparent conductive film containing crystalline metal oxide as its main component on a transparent substrate by a pyrolytic oxidation method. In the method, a gaseous material containing a metal compound, an oxidizing material, and hydrogen chloride is supplied onto the transparent substrate. The process includes sequentially: a first step in which a mole ratio of the hydrogen chloride to the metal compound in the gaseous material is 0.5 to 5; and a second step in which the mole ratio is 2 to 10 and is higher than the mole ratio to be employed in the first step. With the present invention, a transparent substrate with a transparent conductive film can be provided that has a haze ratio of at least 15% and includes a transparent conductive film whose thickness is 300 nm to 750 nm.
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申请公布号 |
US2007026240(A1) |
申请公布日期 |
2007.02.01 |
申请号 |
US20050558663 |
申请日期 |
2005.11.29 |
申请人 |
NIPPON SHEET GLASS COMPANY, LIMITED |
发明人 |
SETO YASUNORI;YOSHIDA HIDEMASA;FUJISAWA AKIRA;SUEYOSHI YUKIO |
分类号 |
B32B9/00;B05D5/06;B32B7/02;B32B17/06;C03C15/00;C03C17/22;C23C16/40;H01B5/14;H01B13/00;H01L31/02;H01L31/04;H01L31/042;H01L31/10;H01L31/18 |
主分类号 |
B32B9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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