| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measurement apparatus capable of simultaneously and individually measuring space images of various patterns formed by an optical system. <P>SOLUTION: The measurement apparatus 59 for measuring space images formed via an optical system includes a reference member 29A arranged at an area wherein the space images are formed, and formed with a plurality of measurement patterns P1 to P6; a plurality of condensing optical systems 82D to 82F for condensing each measurement light via the measurement patterns P1 to P6; transmission optical systems 90A, 92A, 90B and 92B for transmitting the measured light via the condensing optical systems 82D to 82F; and light receiving means 94A, 94B for receiving the measured light transmitted from the transmission optical systems 90A, 92A, 90B and 92B. <P>COPYRIGHT: (C)2007,JPO&INPIT |
