| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligner which improves both imaging performance and a maintenance property by reducing an uncollected liquid. <P>SOLUTION: The aligner has a projection optical system for projecting a pattern image of a reticle to an exposure body and exposes the exposure body via liquid between the final surface of the projection optical system and the exposure body and the projection optical system. The aligner has a supply/collection device for supplying and collecting the liquid, a detection device for detecting a region wherein the liquid between the final surface and the exposure body exists, and a control unit for controlling the supply and collection of the supply/collection device based on detection results of the detection device. <P>COPYRIGHT: (C)2007,JPO&INPIT |
