| 摘要 |
<p>A slide valve in which stabilized control can be ensured by making it possible to control the conductance of a minimum region with high precision, controllability of minimum flow rate can be enhanced by preventing plastic deformation of a slide plate, a valve element and an air drive section can be removed integrally with the slide plate, and maintenance is facilitated. The slide valve (1) comprises a body (3) having a channel (2), and a slide plate (4), which is in the body (3) to move horizontally or on a line, and is perpendicular to the axis of the channel between a closed position for blocking flow in the channel (2) and an open position for allowing flow. In the slide valve (1), an valve element (13) built in the slide plate (4) is opened/closed in the axial direction of the channel through driving of an air cylinder, and minimum conductance control is ensured by providing a slight gap between the body (3) and the upper/lower surface of the slide plate (4) under open state of the valve element (13) so that the slide plate (4) is not deformed plastically even if it is subjected to a differential load under closed state of the valve element (13).</p> |
