| 摘要 |
Cleaning equipment of a semiconductor device is provided to prevent a rotation axis for elevating a wafer supporting plate from breaking down by disconnecting a belt for rotating the rotation axis. A rotation axis supporting unit includes a pair of cylinders(24) and cylinder rods(26) installed in the cylinders. The pair of cylinders are disposed at both sides of first pulleys(13), separated from each other. The end portions of the cylinder rods are disposed to confront the first pulley. A dent portion is formed on the section of the end portions of the cylinder rods. A belt disconnection detecting part(22) is disposed between the first pulley and a second pulley(14) capable of being connected to the first pulley.
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