| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a micromachine switch that can be manufactured easily with improved yields, and can reduce voltage required for operating the switch, and to provide a manufacturing method of the micromachine switch. <P>SOLUTION: The manufacturing method of the micromachine switch comprises a first switch for forming a signal line conductor 14 for propagating high-frequency signals on a substrate 12; a second step for forming a sacrifice layer on the substrate 12 and the signal line conductor 14; a third step for forming a lower electrode layer, a piezoelectric substrate layer, and an upper electrode layer on the sacrifice layer; and a fourth step for forming a beam section 32 in which one end or both ends are supported by the substrate 12 and a piezoelectric body is sandwiched between the lower and upper electrodes by removing one portion of the upper electrode layer, the piezoelectric substrate layer, and the lower electrode layer, and one portion or entire portion of the sacrifice layer. The beam section 32 is extended while being bent when viewed from a direction vertical to the substrate 12. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
