发明名称 SURFACE ACOUSTIC WAVE DEVICE
摘要 PROBLEM TO BE SOLVED: To improve electric characteristics by indicating a more proper substrate cut angle for an SAW device employing a piezoelectric substrate containing an additive. SOLUTION: The SAW device is provided with a single crystal piezoelectric substrate (e.g. LiTaO<SB>3</SB>, LiNbO<SB>3</SB>), and an IDT formed of a material containing Al as a main component provided on the surface of the piezoelectric substrate. In this device, the piezoelectric substrate contains an additive (e.g. Fe, Mn, Cu or Ti), and has an azimuth rotated within a range of 42°to 48°(more preferably, 46°±0.3°) from a Y-axis to a Z-axis direction around an X-axis. The IDT has a standardized film thickness h/λ(h is electrode thickness andλis electrode interval) of 7-11%. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007028538(A) 申请公布日期 2007.02.01
申请号 JP20050211757 申请日期 2005.07.21
申请人 TDK CORP 发明人 SOBU MASAKI;KIHARA YOSHIICHI;OSANAI KATSUNORI;HIROKAWA YUKIO
分类号 H03H9/25;H03H9/145 主分类号 H03H9/25
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