摘要 |
PROBLEM TO BE SOLVED: To improve electric characteristics by indicating a more proper substrate cut angle for an SAW device employing a piezoelectric substrate containing an additive. SOLUTION: The SAW device is provided with a single crystal piezoelectric substrate (e.g. LiTaO<SB>3</SB>, LiNbO<SB>3</SB>), and an IDT formed of a material containing Al as a main component provided on the surface of the piezoelectric substrate. In this device, the piezoelectric substrate contains an additive (e.g. Fe, Mn, Cu or Ti), and has an azimuth rotated within a range of 42°to 48°(more preferably, 46°±0.3°) from a Y-axis to a Z-axis direction around an X-axis. The IDT has a standardized film thickness h/λ(h is electrode thickness andλis electrode interval) of 7-11%. COPYRIGHT: (C)2007,JPO&INPIT
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