摘要 |
PROBLEM TO BE SOLVED: To provide an electronic part for connection or the like achieving a structure capable of appropriately vacuum chucking the electronic part for connection onto a tip part of a mount nozzle by properly forming a surface of a base plate used for the electronic part for connection. SOLUTION: An area D capable of facing a hole formed at tip part of a mount nozzle is formed on a surface 8c of an insulation sheet 8, and an elastic deformable part 6 is arranged in the area D. By this, the electronic part for connection 10 can be surely vacuum chucked by the mount nozzle, and such a structure that the tip part of the mount nozzle does not damage the elastic deformable part 6 can be achieved. COPYRIGHT: (C)2007,JPO&INPIT
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