| 摘要 |
PROBLEM TO BE SOLVED: To adjust a sample at a high gradient angle the sample cooled to very low temperature. SOLUTION: This top entry type sample stage tilting device T is provided with a cooling dome 19 having a stage mounting hole 19b coaxial with an optical axis of a charged particle beam and a liquid helium filling pod 19a provided in an upper outer peripheral part, a sample stage ST provided with a stage rotary shaft 53 rotatably supported in a lower part of the stage mounting hole 19b and a holder mounting member HS detachably attached with a specimen holder H rotating with rotation of the stage rotary shaft 53, a holder tilting shaft 35 connected with the stage rotary shaft 53, a rotary member KS for tilting the stage rotating the holder tilting shaft 35 around its shaft, the low-temperature shield 26 wherein a rotary shaft passage groove 26a is formed in a position the stage rotary shaft 53 passes and a movable shield 27 covering the outside of the rotary shaft passage groove 26a. COPYRIGHT: (C)2007,JPO&INPIT
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