| 摘要 |
PROBLEM TO BE SOLVED: To detect flaws, such as exfoliation or cracks of a surface/surface layer, with high sensitivity. SOLUTION: Heat is applied to a surface to be inspected by a pulse heating means, and a laser interfering image is formed by a shearing optical system 20, by using a laser interfering method; while the formed laser interfering image is subjected to time-resolved measurement by a time-resolved type camera 13 and the laser interfering image signals time-resolved by an image signal processor 14 are respectively measured, before and after heat is applied, to evaluate the flaw by the differential processing of the measured laser interfering image signal. At this time, the time-resolved laser interfering image signal is subjected to logarithmic processing, and flaws are detected with high sensitivity, by discriminating between a steady change part and a non-steady change part. COPYRIGHT: (C)2007,JPO&INPIT
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