| 摘要 |
PROBLEM TO BE SOLVED: To provide a lens unit for detecting minute irregularity on a surface of a body under detection accurately, over a wide area, and at a high speed, and also to provide a shape detector using this lens unit, a shape detection method, and a sheet manufacturing method. SOLUTION: A linearly polarized beam is caused to enter a light separation means to generate two linearly polarized beams, with their optical paths paralleling each other, being in positions shifted in the first direction orthogonal to their traveling direction, and having vibration directions orthogonal to each other. The surface of the body under detection is illuminated with the beams to mix their reflected beams with each other thereby obtaining one beam of light. A linearly polarized beam is generated from this beam of light by means of an analyzer and received by a line sensor camera to detect the shape of the surface of the body under detection. COPYRIGHT: (C)2007,JPO&INPIT
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