| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that when the number of nozzles on a substrate for an inkjet head is increased, or the length of the substrate is increased or decreased, the deformation of the substrate in the tensile direction occurs by the influence of a photosensitive resin formed on the surface of the substrate, and then peeling of a nozzle or deformation of an ejection hole may occur, the ejection direction of ink is not stabilized, and adverse influence is applied to the printing. SOLUTION: Two resin layers having different patterns are formed on a rear face in a process of forming a nozzle and an ink supply hole of an inkjet recording head, warpage of a wafer is prevented, and then cracking of a membrane at the upper portion of the substrate is prevented. Finally, one of the resin layers is removed in the halfway of the process so that one layer of the other resin layer is remained at the rear face of the substrate for an inkjet recording head. COPYRIGHT: (C)2007,JPO&INPIT
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