发明名称 |
Methods, apparatus and computer program products for controlling a volume of liquid in semiconductor processing based on reflected optical radiation |
摘要 |
A method of controlling dispensing of a liquid can include detecting a predetermined shape of a surface of a liquid in a container by reflecting optical radiation from the surface to control a volume of the liquid dispensed into the container. Related apparatus and computer program products are also disclosed.
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申请公布号 |
US2007023085(A1) |
申请公布日期 |
2007.02.01 |
申请号 |
US20050194183 |
申请日期 |
2005.08.01 |
申请人 |
ANDREWS PETER;NEGLEY GERALD H |
发明人 |
ANDREWS PETER;NEGLEY GERALD H. |
分类号 |
G05D9/12 |
主分类号 |
G05D9/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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